椭圆光度法 2024 pdf epub mobi 电子书

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发表于2024-12-23

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出版者:John Wiley & Sons Inc

作者:Fujiwara, Hiroyuki

出品人:

页数:369

译者:

出版时间:2007-1

价格:1717.60元

装帧:HRD

isbn号码:9780470016084

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椭圆光度法 2024 pdf epub mobi 电子书图书描述

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

椭圆光度法 2024 pdf epub mobi 电子书

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