Fundamentals of Nanoscale Film Analysis

出版者:Springer Verlag

作者:Alford, Terry L./ Feldman, Leonard C./ Mayer, James W.

页数:350

出版时间:2007-2

价格:$ 123.17

装帧:HRD

isbn号码:9780387292601

From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to meet these technological requirements, all based on a few processes that govern the interactions of particles and radiation with matter. This book addresses the fundamentals and application of these processes, from thin films to field effect transistors.