Computational Modeling in Semiconductor Processing 2024 pdf epub mobi 电子书

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发表于2024-09-19

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出版者:

作者:Meyyappan, M. 编

出品人:

页数:390

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出版时间:1995-1

价格:$ 45.20

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isbn号码:9780890067079

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Computational Modeling in Semiconductor Processing 2024 pdf epub mobi 电子书图书描述

This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes. The work is intended for those new to the field of process and equipment simulation in electronics materials processing, and also for the experienced modeller. It also contains coverage suitable for graduate students in materials science, and chemical, mechanical and electrical engineering.

Computational Modeling in Semiconductor Processing 2024 pdf epub mobi 电子书

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