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An Introduction to Microelectromechanical Systems Engineering 2024 pdf epub mobi 电子书

An Introduction to Microelectromechanical Systems Engineering
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发表于2024-12-02

An Introduction to Microelectromechanical Systems Engineering 2024 pdf epub mobi 电子书

An Introduction to Microelectromechanical Systems Engineering 2024 pdf epub mobi 电子书

An Introduction to Microelectromechanical Systems Engineering 2024 pdf epub mobi 电子书


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出版者:Artech Print on Demand
作者:Nadim Maluf
出品人:
页数:265
译者:
出版时间:2000-11-30
价格:USD 102.00
装帧:Hardcover
isbn号码:9780890065815
丛书系列:

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An Introduction to Microelectromechanical Systems Engineering 2024 pdf epub mobi 电子书 图书描述

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

An Introduction to Microelectromechanical Systems Engineering 2024 pdf epub mobi 电子书
An Introduction to Microelectromechanical Systems Engineering 2024 pdf epub mobi 电子书
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