This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described.
發表於2025-01-10
Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications 2025 pdf epub mobi 電子書 下載
圖書標籤:
Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications 2025 pdf epub mobi 電子書 下載