Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
發表於2024-12-29
Glow Discharge Processes 2024 pdf epub mobi 電子書 下載
圖書標籤: 電子 physics
Glow Discharge Processes 2024 pdf epub mobi 電子書 下載