This book presents a concise, comprehensive overview of sputter deposition technology, a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
發表於2024-11-26
Handbook of Sputter Deposition Technology 2024 pdf epub mobi 電子書 下載
圖書標籤: sputter
Handbook of Sputter Deposition Technology 2024 pdf epub mobi 電子書 下載