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Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 电子书

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发表于2024-07-01

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 电子书

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 电子书

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 电子书


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出版者:Oxford University Press, USA
作者:Stephen A. Campbell
出品人:
页数:672
译者:
出版时间:2007-09-17
价格:USD 89.95
装帧:Paperback
isbn号码:9780195320176
丛书系列:

图书标签: TextBook  IC  EECS   

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 电子书 图书描述

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite-the Silvaco Athena(R) set of codes-to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 电子书
Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 电子书
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Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 电子书

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