Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite-the Silvaco Athena(R) set of codes-to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.
發表於2024-12-29
Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 電子書 下載
圖書標籤: TextBook IC EECS
麵試撕逼必備
評分麵試撕逼必備
評分教材之一。同時在類似課的係主任麵前pre前選取瞭段落完成PECVD的細節補充,概念原理就不用說瞭,感覺就連實驗細節都快背下來瞭…
評分教材之一。同時在類似課的係主任麵前pre前選取瞭段落完成PECVD的細節補充,概念原理就不用說瞭,感覺就連實驗細節都快背下來瞭…
評分麵試撕逼必備
Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 2024 pdf epub mobi 電子書 下載