Characterization and Metrology for ULSI Technology 2005 2024 pdf epub mobi 电子书

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发表于2024-07-07

Characterization and Metrology for ULSI Technology 2005 2024 pdf epub mobi 电子书

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出版者:American Inst. of Physics

作者:Seiler, D. G.; Seiler, David G.; Diebold, Alain C.

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页数:667

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出版时间:2005-9-29

价格:USD 245.00

装帧:Hardcover

isbn号码:9780735402775

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Characterization and Metrology for ULSI Technology 2005 2024 pdf epub mobi 电子书图书描述

The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.

Characterization and Metrology for ULSI Technology 2005 2024 pdf epub mobi 电子书

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