Characterization and Metrology for ULSI Technology 2005

出版者:American Inst. of Physics

作者:Seiler, D. G.; Seiler, David G.; Diebold, Alain C.

页数:667

出版时间:2005-9-29

价格:USD 245.00

装帧:Hardcover

isbn号码:9780735402775

承接 住宅 自建房 室内改造 装修设计 免费咨询 QQ：624617358 一级注册建筑师 亲自为您回答、经验丰富，价格亲民。无论项目大小，都全力服务。期待合作，欢迎咨询！QQ：624617358

The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.